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Authors
Nalcaci, Burak https://orcid.org/0000-0002-3919-7061
Polat Gonullu, Meryem
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Funding
Funding for this research was provided by:
Gazi Üniversitesi
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Article History
Received: 8 February 2021
Accepted: 15 May 2021
First Online: 28 May 2021
Declarations
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: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
: We understand that all information I provide for this study will be treated confidentially.
: Our results reveal interesting and promising findings of the role of the annealing on crystallographic, morphological, optical and mechanical properties of the Al<sub>2</sub>O<sub>3</sub> films. Experimental data in the current contribution suggest the relation between film thickness, post-annealing temperatures, phase transformations and mechanical properties of thin films growth by ALD which is so limited in the literature due to the various situations like substrate type and post-annealing temperature, different production methods (ALD, CVD, and sputtering), etc.
