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Influence of GaAs crystal anisotropy on deformation behavior and residual stress distribution of nanoscratching

Published Online: 2021-08-21

Published Print: 2021-09

Authors

Xu, Xianghua

Fan, Wengang

Li, Baozhen

Cao, Jianguo
License Information

Text and Data Mining valid from 2021-08-21

Version of Record valid from 2021-08-21
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Article History

Received: 6 July 2021

Accepted: 7 August 2021

First Online: 21 August 2021

Declarations

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: The authors did not receive support from any organization for the submitted work.

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