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Enhancement periodic regularity of surface nano ripple structures on Si wafer using a square shaped flat-top beam femtosecond NIR laser

Crossref DOI link: https://doi.org/10.1007/s00339-021-05144-x

Published Online: 2021-12-16

Published Print: 2022-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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