Effect of thermal annealing on ZnO/AlN/GaN/AlN heterostructure grown on Si substrate by radio frequency sputtering
Crossref DOI link: https://doi.org/10.1007/s00339-023-06635-9
Published Online: 2023-04-21
Published Print: 2023-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mohd Yusoff, M. Z. http://orcid.org/0000-0002-7346-9518
Mahyuddin, A.
Hassan, Z.
Yahya, M. S.
Text and Data Mining valid from 2023-04-21
Version of Record valid from 2023-04-21
Article History
Received: 12 January 2023
Accepted: 7 April 2023
First Online: 21 April 2023
Declarations
:
: The authors declare that they have no conflict of interest.