Fine ablation with depth control of 25-nm resolution and morphologies irradiated by femtosecond laser pulses via beam shaping
Crossref DOI link: https://doi.org/10.1007/s00339-023-06799-4
Published Online: 2023-07-04
Published Print: 2023-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shin, Young-Gwan
Choi, Junha
Cho, Sung-Hak http://orcid.org/0000-0002-4191-1631
Text and Data Mining valid from 2023-07-04
Version of Record valid from 2023-07-04
Article History
Received: 28 February 2023
Accepted: 19 June 2023
First Online: 4 July 2023
Declarations
:
: The authors declare no competing financial interest.