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Zn1−xMgxO film with adjustable properties fabricated by plasma-enhanced atomic layer deposition (PEALD)

Published Online: 2025-04-17

Published Print: 2025-05

Authors

Chen, Xuyuan

Zhao, Wenning https://orcid.org/0000-0002-1612-1849
Tan, Xiaohui

Han, Xiuxun
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (62064005)

Jiangxi Provincial Natural Science Foundation (20242BAB26058, 20232BAB214027, 20242BAB25103)

Innovative Talents Program of Ganzhou (2022CXRC9294)

Scientific Research Foundation of Jiangxi University of Science and Technology (205200100100)
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Text and Data Mining valid from 2025-04-17

Version of Record valid from 2025-04-17
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Article History

Received: 27 January 2025

Accepted: 3 April 2025

First Online: 17 April 2025

Declarations

:

: There are no conflicts to declare.

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