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Effect of femtosecond laser-induced internal stress adjustment zones on 4 H-SiC wafer warpage

Published Online: 2025-08-21

Published Print: 2025-09

Authors

Kuo, Jia-Fan

Tsai, Yun-Chieh

Cheng, Chung-Wei https://orcid.org/0000-0002-9994-0670
Lee, An-Chen
Funding

Funding for this research was provided by:

National Yang Ming Chiao Tung University
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Text and Data Mining valid from 2025-08-21

Version of Record valid from 2025-08-21
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Article History

Received: 8 May 2025

Accepted: 10 August 2025

First Online: 21 August 2025

Declarations

:

: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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