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Low-oxygen micro/nanostructured grooves in 4 H-SiC by femtosecond-laser grooving and finishing

Published Online: 2026-02-25

Published Print: 2026-03

Authors

Chung, An-Sheng

Kuo, Jia-Fan

Cheng, Chung-Wei https://orcid.org/0000-0002-9994-0670
Funding

Funding for this research was provided by:

National Yang Ming Chiao Tung University
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Text and Data Mining valid from 2026-02-25

Version of Record valid from 2026-02-25
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Article History

Received: 18 September 2025

Accepted: 9 February 2026

First Online: 25 February 2026

Declarations

:

: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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