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Mechanism of surface quality enhancement in MHz burst femtosecond laser machining of single-crystal diamond revealed by in-situ observation

Published Online: 2026-04-13

Published Print: 2026-05

Authors

Teshima, Yuta

Yoshizaki, Reina https://orcid.org/0000-0001-6220-8008
Kuroda, Yuya

Sugita, Naohiko
Funding

Funding for this research was provided by:

The University of Tokyo
License Information

Text and Data Mining valid from 2026-04-13

Version of Record valid from 2026-04-13
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Article History

Received: 13 November 2025

Accepted: 2 April 2026

First Online: 13 April 2026

Declarations

:

: Naohiko Sugita and Reina Yoshizaki have received research funding from WAIDA MFG. CO., LTD.

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