Parametererregte mikroelektromechanische Systeme (MEMS)
Crossref DOI link: https://doi.org/10.1007/s00502-015-0372-8
Published Online: 2015-11-05
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kniffka, Till Jochen
Ecker, Horst
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