A novel fabrication process for MEMS spiral inductors realized on oxide islands
Crossref DOI link: https://doi.org/10.1007/s00542-014-2201-0
Published Online: 2014-05-14
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kifle, Teweldebrhan
Chandra, Sudhir
Koul, S. K.
Text and Data Mining valid from 2014-05-14
