Realization of a micro pressure sensor with high sensitivity and overload by introducing beams and Islands
Crossref DOI link: https://doi.org/10.1007/s00542-014-2234-4
Published Online: 2014-06-19
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yu, Zhongliang
Zhao, Yulong
Li, Lili
Li, Cun
Liu, Yan
Tian, Bian
Text and Data Mining valid from 2014-06-19