Bidirectional and location-dependent frequency tuning of single crystal 4H-SiC micromechanical cantilevers
Crossref DOI link: https://doi.org/10.1007/s00542-014-2246-0
Published Online: 2014-06-27
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Feng
Chen, Zhibang
Text and Data Mining valid from 2014-06-27