Low-temperature quartz wafer bonding using hyperbranched polyurethane oligomers
Crossref DOI link: https://doi.org/10.1007/s00542-014-2258-9
Published Online: 2014-07-22
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Jian
Jin, Fei
Zhao, Jianying
Liu, Shaomin
Text and Data Mining valid from 2014-07-22