Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film
Crossref DOI link: https://doi.org/10.1007/s00542-014-2278-5
Published Online: 2014-07-29
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Shushan
Ma, Binghe
Deng, Jinjun
Qu, Hongdong
Luo, Jian
Text and Data Mining valid from 2014-07-29