Cantilever-type microheater fabricated with thick silicon
Crossref DOI link: https://doi.org/10.1007/s00542-014-2288-3
Published Online: 2014-08-05
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ma, Hongyu
Wang, Wenjuan
Ding, Enjie
Zhao, Xiaohu
Cheng, Tingting
Text and Data Mining valid from 2014-08-05