Design and fabrication of microtunnel and Si-diaphragm for ZnO based MEMS acoustic sensor for high SPL and low frequency application
Crossref DOI link: https://doi.org/10.1007/s00542-014-2291-8
Published Online: 2014-08-07
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ali, Washim Reza
Prasad, Mahanth
Text and Data Mining valid from 2014-08-07