Modeling of chemical mechanical polishing processes by cellular automata and finite element/matlab integration methods
Crossref DOI link: https://doi.org/10.1007/s00542-014-2302-9
Published Online: 2014-08-13
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Kuo-Shen
Wu, Shang-Lun
Yeh, Hsiu-Ming
Text and Data Mining valid from 2014-08-13
