System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation
Crossref DOI link: https://doi.org/10.1007/s00542-014-2315-4
Published Online: 2014-09-16
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Song, Zhaohui
Sun, Teng
Wu, Jian
Che, Lufeng
Text and Data Mining valid from 2014-09-16