Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization
Crossref DOI link: https://doi.org/10.1007/s00542-014-2318-1
Published Online: 2014-09-12
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kumar, S. Santosh
Pant, B. D.
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