Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
Crossref DOI link: https://doi.org/10.1007/s00542-014-2319-0
Published Online: 2014-09-19
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ralib, Aliza Aini Md
Nordin, Anis Nurashikin
Alam, AHM Zahirul
Hashim, Uda
Othman, Raihan
Text and Data Mining valid from 2014-09-19