Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method
Crossref DOI link: https://doi.org/10.1007/s00542-014-2321-6
Published Online: 2014-09-27
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Xiao-Qian
Zhou, Zai-Fa
Li, Wei-Hua
Huang, Qing-An
Text and Data Mining valid from 2014-09-27