Robust control of the electrostatic torsional micromirrors
Crossref DOI link: https://doi.org/10.1007/s00542-014-2336-z
Published Online: 2014-10-09
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
He, Guangping
Geng, Zhiyong
Text and Data Mining valid from 2014-10-09