Design and fabrication of a square shape bulk mode MEMS resonators
Crossref DOI link: https://doi.org/10.1007/s00542-014-2347-9
Published Online: 2014-10-19
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zarifi, Mohammad Hossein
Daneshmand, Mojgan
Text and Data Mining valid from 2014-10-19
