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Effect of p-type and n-type piezoresistors on characteristics of high sensitive silicon piezoresistive microcantilever designs

Crossref DOI link: https://doi.org/10.1007/s00542-014-2356-8

Published Online: 2014-11-13

Published Print: 2016-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy