Design, modeling and FEM-based simulations of a 1-DoF MEMS bulk micromachined piezoresistive accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-014-2361-y
Published Online: 2014-11-19
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mukhiya, R.
Gopal, R.
Pant, B. D.
Khanna, V. K.
Bhattacharyya, T. K.
Text and Data Mining valid from 2014-11-19