Fabrication and characterization of sealed cavities realized by adhesive wafer bonding with dry etched Cyclotene™
Crossref DOI link: https://doi.org/10.1007/s00542-015-2416-8
Published Online: 2015-01-14
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bakhtazad, Aref
Manwar, Rayyan
Chowdhury, Sazzadur
Text and Data Mining valid from 2015-01-14
