Microscale material characterization and viscoelastic modeling of organic dielectic thin film in eWLB package
Crossref DOI link: https://doi.org/10.1007/s00542-015-2430-x
Published Online: 2015-02-01
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Unterhofer, Katrin
Preu, Harald
Walter, Jürgen
Döpke, Holger
Text and Data Mining valid from 2015-02-01