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Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure

Crossref DOI link: https://doi.org/10.1007/s00542-015-2438-2

Published Online: 2015-02-06

Published Print: 2015-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Imbert, B.

Blot, X.

Tauzin, A.

Salvetat, T.

Lagoutte, E.

Lecouvey, C.

Chaira, T.

Larrey, V.

Bridoux, C.

Fournel, F.

Delaye, V.

Papon, A.-M.

Moriceau, H.

Carron, V.
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