Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method
Crossref DOI link: https://doi.org/10.1007/s00542-015-2442-6
Published Online: 2015-02-08
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
He, Jingzhi
Yin, Zhifu
Li, Chao
Wang, Wenqiang
Zou, Helin
Text and Data Mining valid from 2015-02-08