Design of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming devices
Crossref DOI link: https://doi.org/10.1007/s00542-015-2447-1
Published Online: 2015-02-07
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Xiuyuan
Zhao, Yulong
Hu, Tengjiang
Xu, Wenju
Zhao, You
Bai, Yingwei
Ren, Wei
Text and Data Mining valid from 2015-02-07