Symmetrical design in piezoresistive sensing for micromechanical resonator
Crossref DOI link: https://doi.org/10.1007/s00542-015-2461-3
Published Online: 2015-02-15
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wei, Wenshan
You, Weilong
Dou, Chuanguo
Wang, Xiaofei
Yang, Heng
Text and Data Mining valid from 2015-02-15