Design a new MEMS tunable capacitors using electro-thermal actuators
Crossref DOI link: https://doi.org/10.1007/s00542-015-2476-9
Published Online: 2015-02-27
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shirazi, Arman Delpasand Motlagh
Faraji, Rasoul
Mehran, Mahdiyeh
Hakimi, Ahmad
Text and Data Mining valid from 2015-02-27