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Analysis of parasitic feed-through capacitance effect in closed-loop drive circuit design for capacitive micro-gyroscope

Crossref DOI link: https://doi.org/10.1007/s00542-015-2538-z

Published Online: 2015-05-12

Published Print: 2016-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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