A dual-axis MEMS capacitive inertial sensor with high-density proof mass
Crossref DOI link: https://doi.org/10.1007/s00542-015-2539-y
Published Online: 2015-04-26
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yamane, Daisuke
Matsushima, Takaaki
Konishi, Toshifumi
Toshiyoshi, Hiroshi
Masu, Kazuya
Machida, Katsuyuki
Text and Data Mining valid from 2015-04-26