Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method
Crossref DOI link: https://doi.org/10.1007/s00542-015-2564-x
Published Online: 2015-05-20
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yin, Zhifu
Sun, Lei
Zou, Helin
Xu, Shenbo
Text and Data Mining valid from 2015-05-20
