Micro-mixer device with deep channels in silicon using modified RIE process: fabrication, packaging and characterization
Crossref DOI link: https://doi.org/10.1007/s00542-015-2579-3
Published Online: 2015-05-24
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dhanekar, Saakshi
Chandra, Sudhir
Balasubramaniam, R.
Funding for this research was provided by:
Department of Science and Technology, Ministry of Science and Technology (IFA 12-ENG-13)
Text and Data Mining valid from 2015-05-24