Numerical investigation into dynamic behavior of electrostatically-actuated circular clamped micro-plate subject to squeeze-film damping effect
Crossref DOI link: https://doi.org/10.1007/s00542-015-2587-3
Published Online: 2015-06-09
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Chin-Chia
Text and Data Mining valid from 2015-06-09