Design and fabrication of differently shaped pyramids on Si{100} by anisotropic wet etching
Crossref DOI link: https://doi.org/10.1007/s00542-015-2590-8
Published Online: 2015-06-30
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Imaeda, Kodai
Bessho, Katsuhiko
Shikida, Mitsuhiro
Text and Data Mining valid from 2015-06-30
