Crossmark

Fabrication of a 2-D in-plane micro needle array integrated with microfluidic components using crystalline wet etching of (110) silicon

Crossref DOI link: https://doi.org/10.1007/s00542-015-2596-2

Published Online: 2015-06-14

Published Print: 2016-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Jung, Minhyun

Jeong, Daehun

Yun, Sung-Sik

Lee, Jong-Hyun
Funding

Funding for this research was provided by:

the Ministry of Science, ICT & Future Planning (MSIP) of Korea (H-GUARD_ERND2013M3A6B2078957)

IMSE, GIST (K04802)
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