Crossmark

Ultrahigh precision low-cost pinpointed SiO2 patterns nanofabrication by using traditional MEMS fabrication processes

Crossref DOI link: https://doi.org/10.1007/s00542-015-2600-x

Published Online: 2015-06-21

Published Print: 2016-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Dai, Pengfei

Zhang, Honglu

Chao, Jie

Fan, Chunhai

Wang, Yuelin

Li, Tie
Funding

Funding for this research was provided by:

National Basic Research Program of China (2012CB934102, 2012CB933301)

National Science and Technology Supporting Program (2012BAJ11B01)

Creative Research of National Natural Science Foundation of China (61021064)

the National Natural Science Foundation of China (60936001, 91123037, 81201358)
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