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Post micromachining of MPW based CMOS–MEMS comb resonator and its mechanical and thermal characterization

Published Online: 2015-07-21

Published Print: 2016-12

Authors

Dennis, John Ojur

Ahmad, Farooq

Khir, M. Haris Bin Md

Hamid, Nor Hisham Bin
Funding

Funding for this research was provided by:

Ministry of Science and Technology (Malaysia) (03-02-02-SF0216)
License Information

Text and Data Mining valid from 2015-07-21

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