Electrical contact performance of MEMS acceleration switch fabricated by UV-LIGA technology
Crossref DOI link: https://doi.org/10.1007/s00542-015-2621-5
Published Online: 2015-07-16
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhou, Zhijian
Nie, Weirong
Xi, Zhanwen
Wang, Xiaofeng
Text and Data Mining valid from 2015-07-16