Effects of slots on thermoelastic quality factor of a vertical beam MEMS resonator
Crossref DOI link: https://doi.org/10.1007/s00542-015-2652-y
Published Online: 2015-08-19
Published Print: 2016-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Asadi, Saeid
Sheikholeslami, Tahereh Fanaei
Text and Data Mining valid from 2015-08-19