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Surface modification of a-Si0.60C0.40:H films by Al-assisted photochemical etching: humidity sensing application

Crossref DOI link: https://doi.org/10.1007/s00542-015-2673-6

Published Online: 2015-09-14

Published Print: 2016-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Boukezzata, A.

Keffous, A.

Gabouze, N.

Guerbous, L.

Ouadjaout, D.

Menari, H.

Kechouane, M.
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