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Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Crossref DOI link: https://doi.org/10.1007/s00542-015-2727-9

Published Online: 2015-12-07

Published Print: 2017-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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