A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters
Crossref DOI link: https://doi.org/10.1007/s00542-015-2736-8
Published Online: 2015-11-28
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hah, Dooyoung http://orcid.org/0000-0002-1290-0597
Text and Data Mining valid from 2015-11-28