Analysis and test of a new MEMS micro-actuator
Crossref DOI link: https://doi.org/10.1007/s00542-015-2802-2
Published Online: 2016-01-07
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tian, W. C.
Chen, Z. Q.
Cao, Y. R.
Funding for this research was provided by:
The National Natural Science Foundation of China (61176130)
Text and Data Mining valid from 2016-01-07