Design and control of a novel piezo-driven XY parallel nanopositioning stage
Crossref DOI link: https://doi.org/10.1007/s00542-016-2854-y
Published Online: 2016-02-11
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Xiaozhi
Zhang, Yulong
Xu, Qingsong
Funding for this research was provided by:
Macao Science and Technology Development Fund (052/2014/A1)
Text and Data Mining valid from 2016-02-11