Fabrication of piezoelectric multilayer thin-film actuators
Crossref DOI link: https://doi.org/10.1007/s00542-016-2860-0
Published Online: 2016-02-09
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kurokawa, Fumiya
Kishimoto, Masaya
Tsujiura, Yuichi
Hida, Hirotaka
Kanno, Isaku
Text and Data Mining valid from 2016-02-09